Lucas Labs: Division of Lucas/Signatone

 

Address: 393-J Tomkins Ct. Gilroy, CA 95020
Phone:
(408) 848-2851
Fax: (408) 848-5763

  
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QuadPro

 

Lucas Signatone QuadPro Resistivity System

  • Reports average resistivity, resistivity standard deviation, average sheet resistance and sheet resistance standard deviation
  • Temperature coefficient of resistance (TCR) measurements integrated with automated temperature chuck and source meter (optional).
  • Automated 2D & 3D contour mapping
  • Employs the dual configuration testing method for improved accuracy and repeatability
  • For samples 10 to 300mm
  • 1 to 49 NIST traceable automated measurements per sample
 
  QuadPro
QuadPro Resistivity System
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QuadPro Automatic System  

The QuadPro includes a computer, stepper controller, and base station with either a 200 or 300mm diameter isolated chuck.

The software allows for selecting 1, 5, 9, 25 or 49 points for automated testing and mapping of the test sample. Positioning patterns may be set to either round or square configuration.

The edge exclusion may also be defined. On the first measurement, the software auto ranges the meter finding the best settings for the sample testing. Dual configuration assures that errors introduced by the probe head manufacturer are eliminated, increasing the repeatability and accuracy of measurements. The Software controller automatically steps to each position and records the X-Y position, Sheet Resistance, Resistivity and V/I measurement in a visible table.

  QuadPro Automatic System
QuadPro Automatic System
 

Upon completion of the test points, a wafer contour map is displayed. The contour map may be toggled between 2D and 3D viewing. The average and standard deviation of resistivity and sheet resistance display prominately above the contour map.

Resistance Temperature Tests
Resistance Temperature Tests

QuadPro TCR Option

The Temperature Coefficient of Resistance option integrates temperature control of the test sample as well as the automated source meter control and resistance calculations. Integrated with a variety of Signatone thermal chuck systems, the test allows setting of temperature steps in degrees C, dwell time at temperature before reading, starting temperature and ending temperature. Each temperature, and resistance reading is stored in a table and plotted on a graph for analysis.

Signatone offers a variety of thermal chucks and temperature ranges. The standard, most common range is ambient to 350°C. However, different combinations of chucks and controllers could have a low of -55°C to a high of 600°C.

The QuadPro standard configuration includes the Keithley 2400 Source Measurement Meter. This meter allows resistance measurements in the range of 1 milliohm to 2 megaohms. Some of the newer high resistance materials require a greater resistance measurement range. For those applications, Signatone implements the Agilent 4156 Parametric Analyzer along with special triaxial shielding. This configuration increases the range from 100 millohms to 10 gigaohms, see to the right.

 
  QuadPro Source Meter Options - Keithley 2400 Source Meter
QuadPro Source Meter Options
Keithley 2400 Source Meter
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  QuadPro Test Screen
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